|hAʯӢƷ˾λڴʯӢƷɢ-BƸЖ|h|hNSʯӢVƷλஔߣ_99.9%ɴ,|hʯӢԼˮƷʯӢɰʯӢʯӢƷ,ڴꑵЈ~ռ95%
ҹ˾2000꣬ʯӢƷa(chn)н(jng)λҪa(chn)ƷʯӢʯӢpʯӢʯӢܡʯӢˮʯӢƬʯӢh(hun)ʯӢ塢ʯӢxNʯӢʯӢܡʯӢoʯӢ⾀гʯӢ⾀ԼNɫʯӢܵʯӢƷ
ʯӢܰNҎ(gu)⡢UV⾀ʯӢܼpʯӢֱ2-180mmں0.5-8mmL10-3000mmBʯӢܡÓuV⾀ܡoͨB۹SiO2_99.6%ϣγߴW(xu)(wn)᷀(wn)׃ԺͿ܃(yu)W(xu)^_93%Óuu10ppm£(jng)^Óuu_5ppmmڸ߉cuȵua(chn)Ʒ;֮¹ˇa(chn)Ʒıڰl(f)ӟܡhtܵV⾀ܞVVЌwк190-320nmL⾀mڭh(hun)ԴocV ⾀෴^253.7nmҲL⾀ǟo⾀ҪVڽеˮ̎ʳƷl(wi)Ț;
ʯӢƷʯӢʯӢݚʯӢʯӢˮסʯӢƬʯӢ塢ʯӢh(hun)ʯӢʯӢxNʯӢʯӢܵȮʯӢܺ͵ͳʯӢ⾀NɫͲʯӢʯӢֱ8-120mm֮gІ_p_ڡA^ƽ^κ͔Usڡ߅ĥɰȼӹߜءgԺüc,VʹڡˮO(sh)ӟˮ̎uȮa(chn)Ʒͭh(hun)l(wi)I(lng)ʯӢݚҎ(gu)8-180mmΠ(j)͑ҪݚϿԽëMŚߜԺãҪJCJDH1-H7_߉cuȮa(chn)Ʒ;
ʯӢˮҪӡˢͰbӹI(y)---- UV̻, UV̻һNʮֿɿȡ՚C\g(sh)Ĺ̻g(sh)ӡˢͰbӹI(y)ѽ(jng)õV(yng)ͳʯӢ⾀ϵÇ(ni)Mg(sh)_l(f)®a(chn)ƷЧY(ji)(gu)·fLrܮa(chn)L253.7nmȏ⾀ݗ䏊100W/cm2,ÓǺ(DNA)^Ɖã@ĚЧ,l(wi)g(sh)Ҏ(gu)ָ˵Ҫ
҂Įa(chn)Ʒ|(zh)_˳Ҏ(gu)ҿԞ͑MЁDϼӹ