* (xing) P(gun)]
ʯӢ
ӆ؛
r(ji)
h
(yng)(bio)}ʯӢ
r(ji)늃x
l(f)˾|h(l)AʯӢƷ˾
؛
(lin)ϵˣx
l(f)؛c(din)K BƸ |h
l(f)r(sh)g20110716
Ч20120116
ھԃPھԃP
a(chn)ƷCϢ|(zh)δӋ(j)
Ϣ
|h(l)AʯӢƷ˾λڴʯӢƷɢ-BƸЖ|h|hN(yn)SʯӢVأƷλஔ(dng)ߣ_(d)99.9%ɴ,|hʯӢԼˮƷʯӢɰʯӢʯӢƷ,ڴꑵЈ(chng)~ռ95% ҹ˾2000꣬ʯӢƷa(chn)I(y)λҪa(chn)ƷʯӢʯӢpʯӢʯӢʯӢˮʯӢƬʯӢh(hun)ʯӢ塢ʯӢxNʯӢܡʯӢʯӢo(w)ʯӢ⾀гʯӢ⾀ԼNɫʯӢܵʯӢƷ ʯӢܰNҎ(gu)⡢uv⾀ʯӢܼpʯӢֱ2-180mmں0.5-8mmL(zhng)10-3000mmBʯӢܡÓuV⾀o(w)ͨB۹sio2_(d)99.6%ϣγߴW(xu)(wn)᷀(wn)ԡ׃ԺͿ܃(yu)W(xu)^(gu)_(d)93%ϣÓuu10ppm(jng)^(gu)Óuu_(d)5ppmmڸ߉cuȵua(chn)Ʒ;֮¹ˇa(chn)Ʒı棬ڰl(f)ӟh(yun)tܵ죻V⾀ܞVVЌ(du)wк190-320nmL(zhng)⾀mڭh(hun)Դo(w)cV ⾀෴^(gu)253.7nmҲL(zhng)⾀ǟo(w)⾀ҪVt(y)еˮ̎ʳƷl(wi)Ț; ʯӢƷʯӢʯӢݚʯӢʯӢˮʯӢƬʯӢʯӢh(hun)ʯӢ塢ʯӢxNʯӢܡʯӢܵȮʯӢܺ͵ͳʯӢ⾀NɫͲʯӢʯӢֱ8-120mm֮gІ_(ki)ڡp_(ki)A^ƽ^κ͔U(ku)s߅ĥɰȼӹߜgԺüc(din),VʹڡˮO(sh)䡢ӟˮ̎uȮa(chn)Ʒͭh(hun)l(wi)I(lng)ʯӢݚҎ(gu)8-180mmΠ(j)͑ҪݚϿԽë(x)ܣM(jn)ŚߜԺҪjcjdh1-h7_(ti)߉cuȮa(chn)Ʒ; ʯӢˮҪӡˢͰbӹI(y)---- uv̻, uv̻һNʮֿɿġȡ՚C(j)\g(sh)Ĺ̻g(sh)ӡˢͰbӹI(y)ѽ(jng)õV(yng)ãͳʯӢ⾀ϵÇ(gu)(ni)M(jn)g(sh)_(ki)l(f)®a(chn)ƷЧ(qing)Y(ji)(gu)·fL(zhng)r(sh)ܮa(chn)L(zhng)253.7nmď(qing)⾀ݗ䏊(qing)100w/cm2,(du)(x)ÓǺ(dna)ИO(qing)Ɖ@ĚЧ,l(wi)g(sh)Ҏ(gu)(xing)ָ(bio)Ҫ ҂Įa(chn)Ʒ|(zh)_(d)(gu)(bio)˳Ҏ(gu)ҿԞ͑M(jn)Ё(li)D(li)ϼӹ
|h(l)AʯӢƷ˾Ϣ
|h(l)AʯӢƷ˾λڴʯӢƷɢ-BƸЖ|h|hN(yn)SʯӢVأƷλஔ(dng)ߣ_(d)99.9%ɴ,|hʯӢԼˮƷʯӢɰʯӢʯӢƷ,ڴꑵЈ(chng)~ռ95%
ҹ˾2000ʯӢƷa(chn)н(jng)(yn)λҪa(chn)ƷʯӢʯӢpʯӢʯӢܡʯӢˮʯӢƬʯӢh(hun)ʯӢ塢ʯӢxNʯӢܡʯӢʯӢܡo(w)ʯӢ⾀гʯӢ⾀ԼNɫʯӢܵʯӢƷʯӢܰNҎ(gu)UV⾀ʯӢܼpʯӢֱ2-180mmں0.5-8mmL(zhng)10-3000mmBʯӢÓuV⾀o(w)ͨB۹SiO2_(d)99.6%γߴW(xu)(wn)᷀(wn)׃ԺͿ܃(yu)W(xu)^(gu)_(d)93%ϣÓuu10ppm(jng)^(gu)Óuu_(d)5ppmmڸ߉cuȵua(chn)Ʒ;֮¹ˇa(chn)Ʒıڰl(f)ܡӟh(yun)tܵV⾀ܞVVЌ(du)wк190-320nmL(zhng)⾀mڭh(hun)Դo(w)cV ⾀෴^(gu)253.7nmҲL(zhng)⾀ǟo(w)⾀ҪVڽеˮ̎ʳƷl(wi)Ț;ʯӢƷʯӢʯӢݚʯӢʯӢˮʯӢƬʯӢʯӢh(hun)ʯӢʯӢxNʯӢܡʯӢܵȮʯӢܺ͵ͳʯӢ⾀NɫͲʯӢʯӢֱ8-120mm֮gІ_(ki)p_(ki)A^ƽ^κ͔U(ku)ڡs߅ĥɰȼӹߜءgԺüc(din),VʹڡˮO(sh)ӟܡˮ̎uȮa(chn)Ʒͭh(hun)l(wi)I(lng)ʯӢݚҎ(gu)8-180mmΠ(j)͑ҪݚϿԽë(x)ܣM(jn)ŚߜأԺҪJCJDH1-H7_(ti)߉cuȮa(chn)Ʒ;ʯӢˮҪӡˢͰbӹI(y)---- UV̻, UV̻һNʮֿɿġȡ՚C(j)\g(sh)Ĺ̻g(sh)ӡˢͰbӹI(y)ѽ(jng)õV(yng)ͳʯӢ⾀ϵÇ(gu)(ni)M(jn)g(sh)_(ki)l(f)®a(chn)ƷЧ(qing)Y(ji)(gu)·fL(zhng)r(sh)ܮa(chn)L(zhng)253.7nmȏ(qing)⾀ݗ䏊(qing)100W/cm2,(du)(x)ÓǺ(DNA)^(qing)Ɖ@ĚЧ,l(wi)g(sh)Ҏ(gu)(xing)ָ(bio)Ҫ҂Įa(chn)Ʒ|(zh)_(d)(gu)(bio)ϣ˳Ҏ(gu)ҿԞ͑M(jn)Ё(li)D(li)ϼӹ
T˔(sh) Se ?du)II(y)~
M(jn)~ ~ ҪЈ(chng),,
͑Ⱥ
˾Q:|h(l)AʯӢƷ˾
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