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|hAʯӢƷ˾λڴʯӢƷɢ-BƸЖ|h|hNSʯӢVأƷλஔߣ_99.9%ɴ,|hʯӢԼˮƷʯӢɰʯӢʯӢƷ,ڴꑵЈ~ռ95% ҹ˾2000꣬ʯӢƷa(chn)I(y)λҪa(chn)ƷʯӢʯӢpʯӢʯӢʯӢˮʯӢƬʯӢh(hun)ʯӢʯӢxNʯӢܡʯӢʯӢܡoʯӢ⾀гʯӢ⾀ԼNɫʯӢܵʯӢƷ ʯӢܰNҎ(gu)uv⾀ʯӢܼpʯӢֱ2-180mmں0.5-8mmL10-3000mmBʯӢܡÓuV⾀ܡoͨB۹sio2_99.6%ϣγߴW(xu)(wn)᷀(wn)ԡ׃ԺͿ܃(yu)W(xu)^_93%Óuu10ppm£(jng)^Óuu_5ppmmڸ߉cuȵua(chn)Ʒ;֮¹ˇa(chn)Ʒıڰl(f)ܡӟhtܵ죻V⾀ܞVVЌwк190-320nmL⾀mڭh(hun)Դ죻ocV ⾀෴^253.7nmҲL⾀ǟo⾀ҪVt(y)еˮ̎ʳƷl(wi)Ț; ʯӢƷʯӢʯӢݚʯӢʯӢˮʯӢƬʯӢʯӢh(hun)ʯӢʯӢxNʯӢʯӢܵȮʯӢܺ͵ͳʯӢ⾀NɫͲʯӢܡʯӢֱ8-120mm֮gІ_p_A^ƽ^κ͔Uڡs߅ĥɰȼӹߜgԺüc,VʹˮO(sh)ӟܡˮ̎uȮa(chn)Ʒͭh(hun)l(wi)I(lng)ʯӢݚҎ(gu)8-180mmΠ(j)͑ҪݚϿԽëMŚߜԺҪjcjdh1-h7_߉cuȮa(chn)Ʒ; ʯӢˮҪӡˢͰbӹI(y)---- uv̻, uv̻һNʮֿɿȡ՚C\g(sh)Ĺ̻g(sh)ӡˢͰbӹI(y)ѽ(jng)õV(yng)ãͳʯӢ⾀ϵÇ(ni)Mg(sh)_l(f)®a(chn)ƷЧY(ji)(gu)·fLrܮa(chn)L253.7nmď⾀ݗ䏊100w/cm2,ÓǺ(dna)ИOƉ@ĚЧ,l(wi)g(sh)Ҏ(gu)ָ˵Ҫ ҂Įa(chn)Ʒ|(zh)_ϣ˳Ҏ(gu)ҿԞ͑MЁDϼӹ
|hAʯӢƷ˾Ϣ
|hAʯӢƷ˾λڴʯӢƷɢ-BƸЖ|h|hNSʯӢVƷλஔߣ_99.9%ɴ,|hʯӢԼˮƷʯӢɰʯӢʯӢƷ,ڴꑵЈ~ռ95%
ҹ˾2000꣬ʯӢƷa(chn)н(jng)λҪa(chn)ƷʯӢʯӢpʯӢʯӢܡʯӢˮʯӢƬʯӢh(hun)ʯӢʯӢxNʯӢʯӢܡʯӢoʯӢ⾀гʯӢ⾀ԼNɫʯӢܵʯӢƷʯӢܰNҎ(gu)⡢UV⾀ʯӢܼpʯӢܣֱ2-180mmں0.5-8mmL10-3000mmBʯӢܡÓuV⾀oͨB۹SiO2_99.6%ϣγߴW(xu)(wn)᷀(wn)ԡ׃ԺͿ܃(yu)W(xu)^_93%Óuu10ppm£(jng)^Óuu_5ppm£mڸ߉cuȵua(chn)Ʒ;֮¹ˇa(chn)Ʒıڰl(f)ܡӟhtܵV⾀ܞVVЌwк190-320nmL⾀mڭh(hun)ԴocV ⾀෴^253.7nmҲL⾀ǟo⾀ҪVڽеˮ̎ʳƷl(wi)Ț;ʯӢƷʯӢʯӢݚʯӢʯӢˮʯӢƬʯӢʯӢh(hun)ʯӢʯӢxNʯӢܡʯӢܵȮʯӢܺ͵ͳʯӢ⾀NɫͲʯӢʯӢֱ8-120mm֮gІ_p_A^ƽ^κ͔Usڡ߅ĥɰȼӹߜgԺüc,VʹˮO(sh)䡢ӟˮ̎uȮa(chn)Ʒͭh(hun)l(wi)I(lng)ʯӢݚҎ(gu)8-180mmΠ(j)͑ҪݚϿԽëܣMŚߜأԺҪJCJDH1-H7_߉cuȮa(chn)Ʒ;ʯӢˮҪӡˢͰbӹI(y)---- UV̻, UV̻һNʮֿɿȡ՚C\g(sh)Ĺ̻g(sh)ӡˢͰbӹI(y)ѽ(jng)õV(yng)ͳʯӢ⾀ϵÇ(ni)Mg(sh)_l(f)®a(chn)ƷЧY(ji)(gu)·fLrܮa(chn)L253.7nmȏ⾀ݗ䏊100W/cm2,ÓǺ(DNA)^Ɖ@ĚЧ,l(wi)g(sh)Ҏ(gu)ָ˵Ҫ҂Įa(chn)Ʒ|(zh)_˳Ҏ(gu)ҿԞ͑MЁDϼӹ
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